Polymer micro piezo valve with a small dead volume

注意：本论文已在《INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 14 (2004) 305–309》发表
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Peige Shao1, Zeno Rummler2 and Werner Karl Schomburg3
Forschungszentrum Karlsruhe, Institut f¨ur Mikrostrukturtechnik, Postfach 3640, D-76021,Karlsruhe, Germany

Abstract:A polymer valve with a small dead volume in the range of 6 nl and a response time faster than 1 ms is presented. The valve structure is simple and therefore easy to fabricate by injection molding or hot embossing. A layer of silicone rubber applied by a stamping technique not only promotes the sealing of the valve but also defines the gluing area during assembly. The fabrication is based on the AMANDA-process, which allows low-cost batch production of polymer micro devices. 

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